- 专利标题: Radio frequency match network and generator
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申请号: US17152634申请日: 2021-01-19
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公开(公告)号: US11961711B2公开(公告)日: 2024-04-16
- 发明人: Alexandre De Chambrier
- 申请人: COMET TECHNOLOGIES USA, INC.
- 申请人地址: US CA San Jose
- 专利权人: COMET TECHNOLOGIES USA, INC.
- 当前专利权人: COMET TECHNOLOGIES USA, INC.
- 当前专利权人地址: US CA San Jose
- 代理机构: Nolte Lackenbach Siegel
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H03H7/38
摘要:
A method of providing data on radio frequency pulses in a radio frequency plasma processing system, the method including measuring an electrical parameter within a matching network of the radio frequency plasma processing system; determining an attribute of the measurement of the electrical parameter; defining a first statistic for the attribute of the measurement of the electrical parameter; defining a second statistic based on the first statistic for at least one of a phase and a process; delivering the first statistic and second statistic to a user; and storing the first statistic and the second statistic within the matching network.
公开/授权文献
- US20210225614A1 RADIO FREQUENCY MATCH NETWORK AND GENERATOR 公开/授权日:2021-07-22
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