- 专利标题: Dual threshold voltage (VT) channel devices and their methods of fabrication
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申请号: US15773536申请日: 2015-12-23
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公开(公告)号: US11967615B2公开(公告)日: 2024-04-23
- 发明人: Hsu-Yu Chang , Neville L. Dias , Walid M. Hafez , Chia-Hong Jan , Roman W. Olac-Vaw , Chen-Guan Lee
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 国际申请: PCT/US2015/000506 2015.12.23
- 国际公布: WO2017/111874A 2017.06.29
- 进入国家日期: 2018-05-03
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L21/265 ; H01L29/66 ; H01L29/78 ; H01L29/161 ; H01L29/165
摘要:
Embodiments of the present invention are directed to dual threshold voltage (VT) channel devices and their methods of fabrication. In an example, a semiconductor device includes a gate stack disposed on a substrate, the substrate having a first lattice constant. A source region and a drain region are formed on opposite sides of the gate electrode. A channel region is disposed beneath the gate stack and between the source region and the drain region. The source region is disposed in a first recess having a first depth and the drain region disposed in a second recess having a second depth. The first recess is deeper than the second recess. A semiconductor material having a second lattice constant different than the first lattice constant is disposed in the first recess and the second recess.
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