- 专利标题: Semiconductor structure and method of manufacturing a semiconductor structure
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申请号: US18480567申请日: 2023-10-04
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公开(公告)号: US11972973B1公开(公告)日: 2024-04-30
- 发明人: Chun-Ming Lin
- 申请人: Chun-Ming Lin
- 申请人地址: TW Hsinchu County
- 专利权人: Chun-Ming Lin
- 当前专利权人: Chun-Ming Lin
- 当前专利权人地址: TW Hsinchu County
- 代理机构: WPAT, P.C.
- 代理商 Anthony King
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/532
摘要:
The present application discloses a semiconductor structure and a method of manufacturing a semiconductor structure. The semiconductor structure includes a conductive line of an Nth metal layer, a first insulating layer, a dielectric layer, a second insulating layer, an interconnect base, and an interconnect body. The first insulating layer is on the conductive line and free from covering a portion of the conductive line. The dielectric layer is on the first insulating layer and free from covering the portion of the conductive line. The second insulating layer is on the dielectric layer and free from covering the portion of the conductive line. The interconnect base is laterally surrounded by the dielectric layer, the first insulating layer, and the second insulating layer. A top surface of the interconnect base and a top surface of the second insulating layer are coplanar.
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