- 专利标题: Semiconductor device
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申请号: US17526840申请日: 2021-11-15
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公开(公告)号: US11973109B2公开(公告)日: 2024-04-30
- 发明人: Young-Hun Kim , Jae Seok Yang , Hae Wang Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Muir Patent Law, PLLC
- 优先权: KR 20180068000 2018.06.14
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/092 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/78 ; H01L21/762
摘要:
A semiconductor device is provided. The semiconductor device comprising a first fin pattern and a second fin pattern which are separated by a first isolation trench and extend in a first direction, a third fin pattern which is spaced apart from the first fin pattern in a second direction intersecting the first direction and extends in the first direction, a fourth fin pattern which is separated from the third fin pattern by a second isolation trench, a first gate structure which intersects the first fin pattern and has a portion extending along an upper surface of the first fin pattern, a second gate structure which intersects the second fin pattern and has a portion extending along an upper surface of the second fin pattern and a first element isolation structure which fills the second isolation trench and faces a short side of the first gate structure.
公开/授权文献
- US20220077284A1 SEMICONDUCTOR DEVICE 公开/授权日:2022-03-10
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