Invention Grant
- Patent Title: Method of fabricating semiconductor device
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Application No.: US17575947Application Date: 2022-01-14
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Publication No.: US11974433B2Publication Date: 2024-04-30
- Inventor: Joo-Heon Kang , Tae Hun Kim , Jae Ryong Sim , Kwang Young Jung , Gi Yong Chung , Jee Hoon Han , Doo Hee Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20190069847 2019.06.13
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/35

Abstract:
A semiconductor memory device includes a third insulating pattern and a first insulating pattern on a substrate, the third insulating pattern and the first insulating pattern being spaced apart from each other in a first direction that is perpendicular to the substrate such that a bottom surface of the third insulating pattern and a top surface of the first insulating pattern face each other, a gate electrode between the bottom surface of the third insulating pattern and the top surface of the first insulating pattern, and including a first side extending between the bottom surface of the third insulating pattern and the top surface of the first insulating pattern, and a second insulating pattern that protrudes from the first side of the gate electrode by a second width in a second direction, the second direction being different from the first direction.
Public/Granted literature
- US20220139954A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE Public/Granted day:2022-05-05
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