Invention Grant
- Patent Title: Vacuum-tight electrical feedthrough
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Application No.: US17761996Application Date: 2019-09-20
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Publication No.: US11976992B2Publication Date: 2024-05-07
- Inventor: Stefan Kaiser , Bernhard Andreaus
- Applicant: INFICON AG
- Applicant Address: LI Balzers
- Assignee: INFICON AG
- Current Assignee: INFICON AG
- Current Assignee Address: LI Balzers
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- International Application: PCT/EP2019/075368 2019.09.20
- International Announcement: WO2021/052600A 2021.03.25
- Date entered country: 2022-03-18
- Main IPC: G01L21/34
- IPC: G01L21/34 ; F16L5/02

Abstract:
A vacuum pressure sensor includes a vacuum-tight electrical feedthrough. The feedthrough has an electrically insulating insulator element with a through-opening, having a first boundary surface adjacent to the through-opening and a second boundary surface also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element which extends through the through-opening and which is connected to the insulator element in a vacuum-tight manner along a circumferential line of the conductor element. The insulator element is transmissive to electromagnetic radiation in an optical wavelength range and the first boundary surface and/or the second boundary surface is formed as a curved surface.
Public/Granted literature
- US20220341802A1 VACUUM-TIGHT ELECTRICAL FEEDTHROUGH Public/Granted day:2022-10-27
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