公开(公告)号：US11268997B1

公开(公告)日：2022-03-08

申请号：US16996561

申请日：2020-08-18

申请人： Keysight Technologies, Inc.

发明人： Jan Verspecht ,  Augustine Stav

IPC分类号： G01L21/32 ,  G01R23/20 ,  H04L27/38 ,  G01R27/28 ,  G01R35/00 ,  H01J41/04 ,  H01J41/06 ,  H01J41/16 ,  H01J41/14 ,  G01L21/00 ,  G01L21/34 ,  G01L19/08

摘要： A system of measuring and correcting for distortions in homodyne systems and a method for operating a data processing system to provide an estimate of distortions in homodyne systems are disclosed. The method for operating a data processing system to provide an estimate of a distortion introduced by a homodyne system when the homodyne system processes a time a multi-tone time domain input signal, x(t), to obtain a time domain output signal, y(t) includes receiving a frequency spectrum, X(f), of the multi-tone time domain input signal, x(t) and measuring an output frequency spectrum, Y(f), when the homodyne system operates on x(t). A plurality of parameters of a model that represents a linear frequency response of the homodyne system when operating on X(f) to arrive at Y(f) by fitting the model to Y(f) and X(f) is determined, and the model is applied to X(f) and Y(f) to estimate the distortions.

公开(公告)号：US10914649B1

公开(公告)日：2021-02-09

申请号：US17060436

申请日：2020-10-01

申请人： Canon Anelva Corporation

发明人： Yohsuke Kawasaki

IPC分类号： G01L21/34 ,  H01J41/06 ,  G01L19/06

摘要： An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. A shape of the through hole on a section along an axial direction of the anode includes a concave portion sandwiched between two convex portions.

公开(公告)号：US09927317B2

公开(公告)日：2018-03-27

申请号：US14795729

申请日：2015-07-09

申请人： MKS Instruments, Inc.

发明人： Douglas C. Hansen

IPC分类号： G01L21/32 ,  G01L21/34 ,  G01L21/30

CPC分类号： G01L21/32 ,  G01L21/30 ,  G01L21/34

摘要： Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.

公开(公告)号：US09683908B2

公开(公告)日：2017-06-20

申请号：US14634804

申请日：2015-02-28

申请人： Ferran Technology, Inc.

发明人： David J. Ferran ,  Robert J. Ferran

IPC分类号： G01L9/00 ,  G01L21/34 ,  G01L9/14 ,  G01L21/00

CPC分类号： G01L9/0072 ,  G01L9/0075 ,  G01L9/14 ,  G01L21/00 ,  G01L21/34

摘要： A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.

公开(公告)号：US20150091579A1

公开(公告)日：2015-04-02

申请号：US14500820

申请日：2014-09-29

申请人： MKS Instruments, Inc,

发明人： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly

IPC分类号： G01L21/34 ,  H01J9/50 ,  G01L19/06

CPC分类号： G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

摘要： A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

摘要翻译： 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。

公开(公告)号：US20100259273A1

公开(公告)日：2010-10-14

申请号：US12724543

申请日：2010-03-16

申请人： Yohsuke Kawasaki ,  Toshio Kikuchi

发明人： Yohsuke Kawasaki ,  Toshio Kikuchi

IPC分类号： G01L21/34

CPC分类号： G01L21/34 ,  H01J41/06

摘要： The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate.

摘要翻译： 本发明提供一种冷阴极电离真空计，即使在长时间使用的情况下也能够在短时间内触发放电，而不需要复杂的装置。 具有棒状阳极位于其一端具有放电空间的测量元件容器（阴极）的内部的结构，该放电空间被密封，并且在该阳极上安装放电起始辅助电极。 放电起动辅助电极通过在放电起动辅助电极板上形成碳纳米管层而在短时间内触发放电。

公开(公告)号：US20050028602A1

公开(公告)日：2005-02-10

申请号：US10910104

申请日：2004-08-03

申请人： Raffaele Correale

发明人： Raffaele Correale

IPC分类号： G01L21/34 ,  H01J41/06 ,  H01J41/10 ,  H01J1/62

CPC分类号： B82Y10/00 ,  H01J41/06

摘要： An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

摘要翻译： 用于测量残留在容器（10）中的气态材料的残余压力的电离真空计更具体地在真空泵的操作之后包括通过利用纳米管技术制成的电子发射阴极（31），栅格（13; 33; 133; 133'），用于加速由阴极发射的电子;以及板（15; 35），其收集气体的离子和/或电离的正分子。 用电流计测量板电流可以确定容器内残余压力的值。

公开(公告)号：US5567882A

公开(公告)日：1996-10-22

申请号：US526699

申请日：1995-09-11

申请人： Kouichi Ichimura ,  Masayuki Nakamoto ,  Masao Obama ,  Hiroshi Masumoto

发明人： Kouichi Ichimura ,  Masayuki Nakamoto ,  Masao Obama ,  Hiroshi Masumoto

IPC分类号： G01L1/25 ,  G01L9/00 ,  G01L11/00 ,  G01L21/34 ,  H01J1/30 ,  H01J21/10

CPC分类号： G01L9/0041 ,  G01L21/34

摘要： The pressure sensor comprises an air-tight vacuum chamber consisting of a hollow cylinder and a pressure-reception diaphragm. The pressure-reception diaphragm is provided to face a space communicating with a space of an object to be measured. A field emission cold cathode device is provided on the inner surface of the pressure-reception diaphragm. The cold cathode device comprises a lot of emitter electrodes arranged in a matrix manner for emitting electrons, and gate electrodes for drawing out electrons. Two anode electrodes facing the cold cathode device are provided on the inner end surface of the cylinder. The anode electrodes are connected to a differential amplifier for amplifying a variation in output distribution between them.

摘要翻译： 压力传感器包括由中空圆筒和受压隔膜组成的气密真空室。 受压隔膜设置成面对与被测量物体的空间连通的空间。 在受压隔膜的内表面上设置场致发射冷阴极器件。 冷阴极器件包括以矩阵方式布置用于发射电子的大量发射极电极和用于引出电子的栅电极。 面对冷阴极器件的两个阳极电极设置在气缸的内端表面上。 阳极电极连接到差分放大器，用于放大它们之间的输出分布的变化。

公开(公告)号：US5198772A

公开(公告)日：1993-03-30

申请号：US843197

申请日：1992-02-28

申请人： Roy N. Peacock ,  Neil T. Peacock

发明人： Roy N. Peacock ,  Neil T. Peacock

IPC分类号： G01L21/34 ,  H01J41/06

CPC分类号： H01J41/06

摘要： A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. A member is also provided for removably positioning the glow lamp within the vacuum space whereby the lamp can be removed during bake out and then subsequent thereto, be inserted within the vacuum space to thus enhance longevity of the lamp.

摘要翻译： 一种冷阴极测量仪，包括设置在量规的真空空间内的辉光灯等，用于启动量规放电，该灯直接在光能的阴极处至少发射出紫外线或蓝光，其中光的能量足以 从阴极释放光电子，从而开始放电。 还提供一种用于将真空灯可拆卸地定位在真空空间内的构件，由此在烘烤期间随后可以将灯除去，然后将其插入真空空间内，从而提高灯的寿命。

公开(公告)号：US4596148A

公开(公告)日：1986-06-24

申请号：US592241

申请日：1984-03-22

申请人： Rainer Lasser ,  Karl-Heinz Klatt

发明人： Rainer Lasser ,  Karl-Heinz Klatt

IPC分类号： G01L21/34 ,  G01L21/36 ,  G01N27/70 ,  G01L21/30

CPC分类号： G01L21/36 ,  G01N27/70

摘要： The total pressure of pure tritium or the partial pressure of tritium or another radioactive isotope depending upon the calibration is measured utilizing a cylindrical positive electrode, an axial central thin negative electrode coaxial with the cylindrical electrode and a source having a voltage up to 200 V connected in circuits of these electrodes. The circuit also includes a picoampere meter or a high ohmic resistance whose voltage drop is monitored by a digital volt meter so that currents of the order of picoamperes in the circuit can be detected and with appropriate calibration of the unit can provide an output which represents the pressure.

摘要翻译： 使用圆柱形正电极，与圆柱形电极同轴的轴向中心薄负电极和具有高达200V电压的电源来测量纯氚的总压力或氚或另一放射性同位素的分压，其取决于校准 在这些电极的电路中。 该电路还包括微米电表或高欧姆电阻，其电压降由数字电压表监测，使得可以检测电路中微微安全级数的电流，并且通过适当的校准可以提供代表 压力。