Invention Grant
- Patent Title: Deep generative model-based alignment for semiconductor applications
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Application No.: US17308878Application Date: 2021-05-05
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Publication No.: US11983865B2Publication Date: 2024-05-14
- Inventor: Bjorn Brauer , Richard Wallingford
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corp.
- Current Assignee: KLA Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T7/33

Abstract:
Methods and systems for deep learning alignment for semiconductor applications are provided. One method includes transforming first actual information for an alignment target on a specimen from either design data to a specimen image or a specimen image to design data by inputting the first actual information into a deep generative model such as a GAN. The method also includes aligning the transformed first actual information to second actual information for the alignment target, which has the same information type as the transformed first actual information. The method further includes determining an offset between the transformed first actual information and the second actual information based on results of the aligning and storing the determined offset as an align-to-design offset for use in a process performed on the specimen.
Public/Granted literature
- US20220375051A1 DEEP GENERATIVE MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS Public/Granted day:2022-11-24
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