- 专利标题: Anomaly detection method and system for manufacturing processes
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申请号: US17229293申请日: 2021-04-13
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公开(公告)号: US11984334B2公开(公告)日: 2024-05-14
- 发明人: Makoto Murai , Shin Moriga , Atsushi Suyama , Motoaki Hayashi , Takuya Kudo
- 申请人: Accenture Global Solutions Limited
- 申请人地址: IE Dublin
- 专利权人: Accenture Global Solutions Limited
- 当前专利权人: Accenture Global Solutions Limited
- 当前专利权人地址: IE Dublin
- 代理机构: Fish & Richardson P.C.
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; G05B19/418 ; G06N20/00
摘要:
The present disclosure describes a computer-implemented method for detecting anomalies during lot production, wherein the products within a production lot are processed according to a sequence of steps that include manufacturing steps and one or more quality control steps interspersed among the manufacturing steps, the method comprising: obtaining process quality inspection data from each of the one or more quality control steps for a first production lot; obtaining product characteristics data for the products in the first production lot after the final step in the sequence; training a Gaussian process regression model using the process quality inspection data and the product characteristics data from the first production lot; generating a predictive distribution of the product characteristics data using the Gaussian process regression model that uses a bathtub kernel function; obtaining process quality inspection data from each of the quality control steps for a second production lot; identifying anomalies in the second production lot using the predictive distribution of the product characteristics data and the process quality inspection data from the second production lot; if no anomalies are detected in the second production lot, updating the Gaussian process regression model using the process quality inspection data from the second production lot; setting target values for one or more values in the process quality inspection data based on the predictive distribution of the product characteristic; and adjusting settings of one or more manufacturing steps based on the target values.
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