Invention Grant
- Patent Title: Anomaly detection method and system for manufacturing processes
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Application No.: US17229293Application Date: 2021-04-13
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Publication No.: US11984334B2Publication Date: 2024-05-14
- Inventor: Makoto Murai , Shin Moriga , Atsushi Suyama , Motoaki Hayashi , Takuya Kudo
- Applicant: Accenture Global Solutions Limited
- Applicant Address: IE Dublin
- Assignee: Accenture Global Solutions Limited
- Current Assignee: Accenture Global Solutions Limited
- Current Assignee Address: IE Dublin
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05B19/418 ; G06N20/00

Abstract:
The present disclosure describes a computer-implemented method for detecting anomalies during lot production, wherein the products within a production lot are processed according to a sequence of steps that include manufacturing steps and one or more quality control steps interspersed among the manufacturing steps, the method comprising: obtaining process quality inspection data from each of the one or more quality control steps for a first production lot; obtaining product characteristics data for the products in the first production lot after the final step in the sequence; training a Gaussian process regression model using the process quality inspection data and the product characteristics data from the first production lot; generating a predictive distribution of the product characteristics data using the Gaussian process regression model that uses a bathtub kernel function; obtaining process quality inspection data from each of the quality control steps for a second production lot; identifying anomalies in the second production lot using the predictive distribution of the product characteristics data and the process quality inspection data from the second production lot; if no anomalies are detected in the second production lot, updating the Gaussian process regression model using the process quality inspection data from the second production lot; setting target values for one or more values in the process quality inspection data based on the predictive distribution of the product characteristic; and adjusting settings of one or more manufacturing steps based on the target values.
Public/Granted literature
- US20220328332A1 ANOMALY DETECTION METHOD AND SYSTEM FOR MANUFACTURING PROCESSES Public/Granted day:2022-10-13
Information query
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