Invention Grant
- Patent Title: Filter circuit
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Application No.: US17520500Application Date: 2021-11-05
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Publication No.: US11990318B2Publication Date: 2024-05-21
- Inventor: Yohei Yamazawa
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 20185717 2020.11.06 JP 20217101 2020.12.25 JP 21116623 2021.07.14
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
There is provided a filter circuit provided in a plasma processing device for processing a substrate using plasma generated using power of a first frequency of 4 MHz or more and power of a second frequency of 100 Hz or more and less than 4 MHz. The filter circuit comprises: a first filter provided in a wiring between a conductive member provided in the plasma processing device and a power supply configured to supply power of a third frequency of less than 100 Hz or control power which is direct-current (DC) power, to the conductive member; and a second filter provided in a wiring between the first filter and the power supply.
Public/Granted literature
- US20220148854A1 FILTER CIRCUIT Public/Granted day:2022-05-12
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