- 专利标题: Lateral heterojunction bipolar transistor with emitter and/or collector regrown from substrate and method
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申请号: US17511613申请日: 2021-10-27
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公开(公告)号: US11990535B2公开(公告)日: 2024-05-21
- 发明人: Alexander M. Derrickson , Haiting Wang , Judson R. Holt , Vibhor Jain , Richard F. Taylor, III
- 申请人: GLOBALFOUNDRIES U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人地址: US NY Malta
- 代理机构: Hoffman Warnick LLC
- 代理商 Francois Pagette
- 主分类号: H01L29/737
- IPC分类号: H01L29/737 ; H01L21/02 ; H01L21/225 ; H01L29/08 ; H01L29/10 ; H01L29/165 ; H01L29/66
摘要:
Disclosed is a semiconductor structure including a lateral heterojunction bipolar transistor (HBT). The structure includes a substrate (e.g., a silicon substrate), an insulator layer on the substrate, and a semiconductor layer (e.g., a silicon germanium layer) on the insulator layer. The structure includes a lateral HBT with three terminals including a collector, an emitter, and a base, which is positioned laterally between the collector and the emitter and which can include a silicon germanium intrinsic base region for improved performance. Additionally, the collector and/or the emitter includes: a first region, which is epitaxially grown within a trench that extends through the semiconductor layer and the insulator layer to the substrate; and a second region, which is epitaxially grown on the first region. The connection(s) of the collector and/or the emitter to the substrate effectively form thermal exit path(s) and minimize self-heating. Also disclosed is a method for forming the structure.
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