Invention Grant
- Patent Title: Alignment mark, mask and display substrate motherboard
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Application No.: US16966874Application Date: 2019-11-29
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Publication No.: US11994810B2Publication Date: 2024-05-28
- Inventor: Li Xiao , Jiao Zhao , Dongni Liu , Minghua Xuan , Haoliang Zheng , Liang Chen , Hao Chen , Zhenyu Zhang , Jing Liu , Qi Qi
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: The Webb Law Firm
- International Application: PCT/CN2019/122047 2019.11.29
- International Announcement: WO2021/102934A 2021.06.03
- Date entered country: 2020-07-31
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F1/42
Abstract:
An alignment mark includes a first alignment marker located on a first surface of a substrate and a second alignment marker located on a second surface of the substrate. The second alignment marker is arranged to be matched with the first alignment marker, and capable of representing a process variation between the second alignment marker and the first alignment marker.
Public/Granted literature
- US20220373900A1 ALIGNMENT MARK, MASK AND DISPLAY SUBSTRATE MOTHERBOARD Public/Granted day:2022-11-24
Information query
