Invention Grant
- Patent Title: Computer-implemented method for automatically producing metrology test plan
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Application No.: US17201912Application Date: 2021-03-15
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Publication No.: US12000694B2Publication Date: 2024-06-04
- Inventor: Thomas Guth , Annett Froewis , Birgit Huber , Günter Haas , Ana Carolina Mayr Adam
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agent Miller Johnson
- Priority: EP 163348 2020.03.16
- Main IPC: G01B21/20
- IPC: G01B21/20

Abstract:
A computer-implemented method automatically produces a test plan for measuring a measured object. The method includes obtaining a desired dataset of the measured object. The method includes providing a starting pattern. The providing comprises producing a division. The producing the division comprises applying at least one division function. The division has a plurality of division indices. The method includes producing a target pattern by generating a comparison between the desired dataset and the division. At least one division index is adapted in response to a deviation of the division from the desired dataset. The method includes creating at least one element with at least one piece of pattern information in the test plan in accordance with the target pattern.
Public/Granted literature
- US20210285763A1 Computer-Implemented Method for Automatically Producing Metrology Test Plan Public/Granted day:2021-09-16
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