Invention Grant
- Patent Title: Method and apparatus for pressure based mass flow control
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Application No.: US17651751Application Date: 2022-02-18
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Publication No.: US12000723B2Publication Date: 2024-06-04
- Inventor: Junhua Ding
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01F1/88
- IPC: G01F1/88 ; G01F15/00 ; G05D7/00 ; G05D16/00

Abstract:
Mass flow controllers that can provide for improved bleeding time and can be manufactured with less complexity and cost are provided. A mass flow controller includes a body having a valve outlet bore defining a flow path and an adjustable valve configured to control flow of a gas through the flow path. A valve element includes an outlet orifice of the adjustable valve and is disposed within the bore. The mass flow controller further includes a pressure drop element disposed coaxially with the valve element within the bore. An upstream pressure sensor is configured to detect a pressure at a location in the flow path between the adjustable valve and the pressure drop element, and a controller is configured to determine a flow rate through the flow path based on pressure as detected by the upstream pressure sensor.
Public/Granted literature
- US20230266156A1 Method and Apparatus for Pressure Based Mass Flow Control Public/Granted day:2023-08-24
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