Invention Grant
- Patent Title: Substrate treatment device
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Application No.: US17195924Application Date: 2021-03-09
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Publication No.: US12005482B2Publication Date: 2024-06-11
- Inventor: Kensuke Demura , Daisuke Matsushima , Masaya Kamiya
- Applicant: Shibaura Mechatronics Corporation
- Applicant Address: JP Yokohama
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: PEARNE & GORDON LLP
- Priority: JP 20062170 2020.03.31 JP 21001890 2021.01.08
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/10 ; B08B7/00

Abstract:
According to one embodiment, q substrate treatment device includes a placement stand, a plurality of support portions, a cooling part, a liquid supplier, and at least one protrusion. The placement stand has a plate shape, and is configured to rotate. The support portions are provided on one surface of the placement stand and configured to support a substrate. The cooling part is configured to supply a cooling gas into a space between the placement stand and a back surface of the substrate supported by the support portions. The liquid supplier is configured to supply a liquid onto a surface of the substrate. At least one protrusion is provided on the one surface of the placement stand and extends along a boundary line of a region where the substrate is provided in a plan view.
Public/Granted literature
- US20210299713A1 SUBSTRATE TREATMENT DEVICE Public/Granted day:2021-09-30
Information query
IPC分类: