- 专利标题: Three-dimensional shape measuring apparatus
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申请号: US17674953申请日: 2022-02-18
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公开(公告)号: US12013230B2公开(公告)日: 2024-06-18
- 发明人: Takashi Suzuki , Shinya Takahashi
- 申请人: Keyence Corporation
- 申请人地址: JP Osaka
- 专利权人: KEYENCE CORPORATION
- 当前专利权人: KEYENCE CORPORATION
- 当前专利权人地址: JP Osaka
- 代理机构: Kilyk & Bowersox, P.L.L.C.
- 优先权: JP 21063482 2021.04.02
- 主分类号: G01B11/25
- IPC分类号: G01B11/25 ; G06T7/521 ; G06T7/55
摘要:
A shape measuring apparatus includes a stage, a light projecting portion, a light receiving portion, and a rotation unit. The rotation unit is attached to an end of the stage. The rotation unit rotates the measurement subject about a rotation axis that vertically intersects while holding the measurement subject. In a state where the measurement subject is at a predetermined rotation angular position, the pattern light is emitted from the light projecting portion to the measurement subject a plurality of times while being phase-shifted. At this time, the light receiving portion captures an image of the measurement subject. Three-dimensional shape data is generated on the basis of a plurality of pieces of image data obtained by imaging.
公开/授权文献
- US20220316867A1 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 公开/授权日:2022-10-06
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