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1.发明申请Measurement Target Measuring Program, Measurement Target Measuring Method, And Magnifying Observation Device 有权测量目标测量程序，测量目标测量方法和放大观察装置公开(公告)号：US20170030706A1
公开(公告)日：2017-02-02
申请号：US15208630
申请日：2016-07-13
申请人： Keyence Corporation
发明人： Kazuki Natori , Shinya Takahashi
CPC分类号： G01B11/0608 , G06T7/001 , G06T7/337 , G06T7/521 , G06T7/60 , G06T2200/04 , G06T2207/10056 , G06T2207/20101 , G06T2207/30164
摘要： Provided are a measurement target measuring method, and a magnifying observation device which make it possible to readily and intuitively recognize a deviation between actual height image data and CAD data concerning a specific portion of a measurement target. A CAD height data generation unit generates a plurality of pieces of CAD height data based on basic CAD data. A reference height data selection unit selects reference height data from the plurality of pieces of CAD height data. A reference appearance image data acquisition unit acquires a reference appearance image corresponding to the reference height data. A target image display unit displays a target image based on texture image data or actual height image data, and a reference image display unit displays a reference image based on the reference appearance image data or the reference height data.
摘要翻译： 提供了一种测量对象测量方法和放大观察装置，其能够容易且直观地识别实际高度图像数据与关于测量对象的特定部分的CAD数据之间的偏差。 CAD高度数据生成单元基于基本CAD数据生成多个CAD高度数据。 参考高度数据选择单元从多个CAD高度数据中选择参考高度数据。 参考外观图像数据获取单元获取与基准高度数据相对应的参考外观图像。 目标图像显示单元基于纹理图像数据或实际高度图像数据显示目标图像，并且参考图像显示单元基于参考外观图像数据或参考高度数据显示参考图像。
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2.发明授权Measurement microscope device, image generating method, measurement microscope device operation program, and computer-readable recording medium 有权测量显微镜装置，图像生成方法，测量显微镜装置操作程序和计算机可读记录介质公开(公告)号：US09291450B2
公开(公告)日：2016-03-22
申请号：US14042998
申请日：2013-10-01
申请人： Keyence Corporation
发明人： Shinya Takahashi
IPC分类号： H04N9/47 , H04N7/18 , G01B11/24 , G01B9/04 , G02B21/00 , G02B21/36 , G06K9/20 , G01B11/25 , G06K9/00 , G06K9/46
CPC分类号： G01B11/24 , G01B9/04 , G01B11/2531 , G01B2210/52 , G02B21/0016 , G02B21/367 , G06K9/00134 , G06K9/00214 , G06K9/2036 , G06K9/4638
摘要： An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.
摘要翻译： 可以捕获具有宽视野的图像，而不会导致测量精度的劣化。 提供：放置物体的阶段; 用于显示高度图像或观察图像的显示单元; 用于对所述高度图像进行测量的测量单元; 图像连接单元，被配置为通过移动所述平台并捕获不同的区域，获取多个高度图像，并且连接所获得的多个高度图像和观察图像以生成连接图像; 测量误差区域显示单元，被配置为将测量误差区域叠加并显示在所述物体的图像上; 以及测量图像成像条件设置单元，用于调整用于生成高度图像所需的条纹图像的成像条件以减少测量误差区域。
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3.发明申请Image Inspection Device, Image Inspection Method And Image Inspection Program 有权图像检测装置，图像检查方法和图像检查程序公开(公告)号：US20170032177A1
公开(公告)日：2017-02-02
申请号：US15208628
申请日：2016-07-13
申请人： Keyence Corporation
发明人： Tsuyoshi Suenaga , Shinya Takahashi
CPC分类号： G06K9/00208 , G06K9/6202 , G06T7/001 , G06T7/30 , G06T7/40 , G06T7/521 , G06T7/60 , G06T7/70 , G06T7/74 , G06T2200/24 , G06T2207/10016 , G06T2207/10024 , G06T2207/10028 , G06T2207/10056 , G06T2207/10148 , G06T2207/30148
摘要： Provided is an image inspection device, an image inspection method and an image inspection program which are capable of easily and accurately inspecting a shape of an inspection target. In a setting mode, positioning image data of a setting target placed on a stage is registered. In an inspection mode, a positioning image is displayed on a display part based on the positioning image data. An image for positioning of the inspection target placed on the stage is displayed in the display part. Thereafter, image data for alignment of the inspection target is acquired, and then aligned to image data for alignment of the setting target. A size in a height direction of a measurement target place of the inspection target is measured based on the aligned height image data, to determine Pass/Fail of the inspection target. The determined determination result is displayed on the display unit.
摘要翻译： 提供能够容易且准确地检查检查对象的形状的图像检查装置，图像检查方法和图像检查程序。 在设定模式中，登录放置在舞台上的设定对象的图像数据的定位。 在检查模式中，基于定位图像数据在显示部分上显示定位图像。 在显示部显示用于放置在台架上的检查对象的定位用的图像。 此后，获取用于检查对象的对准的图像数据，然后对准用于对准设定对象的图像数据。 基于对准的高度图像数据测量检查对象的测量对象位置的高度方向的尺寸，以确定检查对象的通过/失败。 确定的确定结果显示在显示单元上。
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公开(公告)号：US10704899B2
公开(公告)日：2020-07-07
申请号：US16355884
申请日：2019-03-18
申请人： Keyence Corporation
发明人： Shinya Takahashi
摘要： A shape measuring device includes a stereoscopic-shape-data generating section 212 configured to generate stereoscopic shape data indicating a shape of the measurement object with a pattern projection method, a measurement-setting automatically adjusting section 217 configured to automatically adjust measurement setting for the partial regions on the basis of at least one of stereoscopic shape data of the partial regions and light reception data acquired in the partial regions when the stereoscopic shape data is generated, and a stereoscopic-shape-data coupling section 219 configured to couple, according to the measurement setting for the partial regions adjusted by a measurement setting adjusting section, the stereoscopic shape data of the partial regions generated again by the stereoscopic-shape-data generating section 212 and generate coupled stereoscopic shape data corresponding to the coupled region.
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5.发明申请Measurement Microscope Device, Image Generating Method, Measurement Microscope Device Operation Program, And Computer-Readable Recording Medium 有权测量显微镜设备，图像生成方法，测量显微镜设备操作程序和计算机可读记录介质公开(公告)号：US20140152794A1
公开(公告)日：2014-06-05
申请号：US14042998
申请日：2013-10-01
申请人： Keyence Corporation
发明人： Shinya Takahashi
IPC分类号： G01B11/24
CPC分类号： G01B11/24 , G01B9/04 , G01B11/2531 , G01B2210/52 , G02B21/0016 , G02B21/367 , G06K9/00134 , G06K9/00214 , G06K9/2036 , G06K9/4638
摘要： An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.
摘要翻译： 可以捕获具有宽视野的图像，而不会导致测量精度的劣化。 提供：放置物体的阶段; 用于显示高度图像或观察图像的显示单元; 用于对所述高度图像进行测量的测量单元; 图像连接单元，被配置为通过移动所述平台并捕获不同的区域，获取多个高度图像，并且连接所获得的多个高度图像和观察图像以生成连接图像; 测量误差区域显示单元，被配置为将测量误差区域叠加并显示在所述物体的图像上; 以及测量图像成像条件设置单元，用于调整用于生成高度图像所需的条纹图像的成像条件以减少测量误差区域。
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公开(公告)号：US09970745B2
公开(公告)日：2018-05-15
申请号：US15208630
申请日：2016-07-13
申请人： Keyence Corporation
发明人： Kazuki Natori , Shinya Takahashi
CPC分类号： G01B11/0608 , G06T7/001 , G06T7/337 , G06T7/521 , G06T7/60 , G06T2200/04 , G06T2207/10056 , G06T2207/20101 , G06T2207/30164
摘要： Provided are a measurement target measuring method, and a magnifying observation device which make it possible to readily and intuitively recognize a deviation between actual height image data and CAD data concerning a specific portion of a measurement target. A CAD height data generation unit generates a plurality of pieces of CAD height data based on basic CAD data. A reference height data selection unit selects reference height data from the plurality of pieces of CAD height data. A reference appearance image data acquisition unit acquires a reference appearance image corresponding to the reference height data. A target image display unit displays a target image based on texture image data or actual height image data, and a reference image display unit displays a reference image based on the reference appearance image data or the reference height data.
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公开(公告)号：US09959451B2
公开(公告)日：2018-05-01
申请号：US15208628
申请日：2016-07-13
申请人： Keyence Corporation
发明人： Tsuyoshi Suenaga , Shinya Takahashi
CPC分类号： G06K9/00208 , G06K9/6202 , G06T7/001 , G06T7/30 , G06T7/40 , G06T7/521 , G06T7/60 , G06T7/70 , G06T7/74 , G06T2200/24 , G06T2207/10016 , G06T2207/10024 , G06T2207/10028 , G06T2207/10056 , G06T2207/10148 , G06T2207/30148
摘要： Provided is an image inspection device, an image inspection method and an image inspection program which are capable of easily and accurately inspecting a shape of an inspection target. In a setting mode, positioning image data of a setting target placed on a stage is registered. In an inspection mode, a positioning image is displayed on a display part based on the positioning image data. An image for positioning of the inspection target placed on the stage is displayed in the display part. Thereafter, image data for alignment of the inspection target is acquired, and then aligned to image data for alignment of the setting target. A size in a height direction of a measurement target place of the inspection target is measured based on the aligned height image data, to determine Pass/Fail of the inspection target. The determined determination result is displayed on the display unit.
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公开(公告)号：US12013230B2
公开(公告)日：2024-06-18
申请号：US17674953
申请日：2022-02-18
申请人： Keyence Corporation
发明人： Takashi Suzuki , Shinya Takahashi
CPC分类号： G01B11/254 , G01B11/2522 , G06T7/521 , G06T7/55
摘要： A shape measuring apparatus includes a stage, a light projecting portion, a light receiving portion, and a rotation unit. The rotation unit is attached to an end of the stage. The rotation unit rotates the measurement subject about a rotation axis that vertically intersects while holding the measurement subject. In a state where the measurement subject is at a predetermined rotation angular position, the pattern light is emitted from the light projecting portion to the measurement subject a plurality of times while being phase-shifted. At this time, the light receiving portion captures an image of the measurement subject. Three-dimensional shape data is generated on the basis of a plurality of pieces of image data obtained by imaging.
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公开(公告)号：US20190323830A1
公开(公告)日：2019-10-24
申请号：US16355884
申请日：2019-03-18
申请人： Keyence Corporation
发明人： Shinya Takahashi
摘要： A shape measuring device includes a stereoscopic-shape-data generating section 212 configured to generate stereoscopic shape data indicating a shape of the measurement object with a pattern projection method, a measurement-setting automatically adjusting section 217 configured to automatically adjust measurement setting for the partial regions on the basis of at least one of stereoscopic shape data of the partial regions and light reception data acquired in the partial regions when the stereoscopic shape data is generated, and a stereoscopic-shape-data coupling section 219 configured to couple, according to the measurement setting for the partial regions adjusted by a measurement setting adjusting section, the stereoscopic shape data of the partial regions generated again by the stereoscopic-shape-data generating section 212 and generate coupled stereoscopic shape data corresponding to the coupled region.
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