- 专利标题: Bolometer and method for manufacturing same
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申请号: US17731435申请日: 2022-04-28
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公开(公告)号: US12013288B2公开(公告)日: 2024-06-18
- 发明人: Mayumi Kosaka
- 申请人: NEC Corporation
- 申请人地址: JP Tokyo
- 专利权人: NEC CORPORATION
- 当前专利权人: NEC CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP 21080882 2021.05.12
- 主分类号: G01J5/061
- IPC分类号: G01J5/061 ; G01J5/02 ; G01J5/04 ; G01J5/22
摘要:
An object of the present invention is to provide a bolometer having a high TCR value and a low resistance, and a method for manufacturing the same.
According to the present invention, a bolometer manufacturing method including: fabricating an interlayer having a function that enhances binding between a substrate and a carbon nanotube, in a predetermined shape on the substrate; and, making a semiconducting carbon nanotube dispersion liquid move on the interlayer in one direction relative to the fabricated interlayer is provided.
According to the present invention, a bolometer manufacturing method including: fabricating an interlayer having a function that enhances binding between a substrate and a carbon nanotube, in a predetermined shape on the substrate; and, making a semiconducting carbon nanotube dispersion liquid move on the interlayer in one direction relative to the fabricated interlayer is provided.
公开/授权文献
- US20220364928A1 BOLOMETER AND METHOD FOR MANUFACTURING SAME 公开/授权日:2022-11-17
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