- 专利标题: Robot gripper for moving wafer carriers and packing materials and method of operating the same
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申请号: US18316853申请日: 2023-05-12
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公开(公告)号: US12017342B2公开(公告)日: 2024-06-25
- 发明人: Chien-Fa Lee , Feng-Kuang Wu , Fu-Cheng Hung , Chi-Wei Chen , Chih-Hua Chen
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT LAW
- 代理商 Anthony King
- 主分类号: B25J11/00
- IPC分类号: B25J11/00 ; B25J15/00 ; B65B69/00 ; H01L21/673
摘要:
A robot gripper for moving wafer carriers and packing materials and a method of operating the same are provided. The gripper mechanism has two clamp assemblies, each with a support pin at the bottom. The clamps are configured to move towards or away from each other, and the support pins are configured to move relative to the clamp assemblies. The first clamp assembly has a main clamp and a secondary clamp with a protrusion, while the second clamp assembly has a similar configuration.
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