Invention Grant
- Patent Title: Capacitively operable MEMS switch
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Application No.: US17653935Application Date: 2022-03-08
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Publication No.: US12027336B2Publication Date: 2024-07-02
- Inventor: Jochen Reinmuth , Matthew Lewis
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2021202409.2 2021.03.12
- Main IPC: H01H59/00
- IPC: H01H59/00

Abstract:
A MEMS switch having a substrate, a micromechanical function layer situated above the substrate, and a fixed part and an electrically operable, deflectable switch element are developed in the micromechanical function layer, the switch element for closing an electrically conductive contact with the fixed part being suspended on at least one first spring in a deflectable manner. In a first operating state, the switch element is in a first position at a first distance from the fixed part, and the electrical contact is open. In a second operating state, the switch element is in a second position at a second distance from the fixed part, and the first spring is deflected and exerts a first restoring force, and the switch element establishes an operative connection with at least one second spring and the electrical contact is open. In a third operating state, the switch element is in a third position.
Public/Granted literature
- US20220293383A1 CAPACITIVELY OPERABLE MEMS SWITCH Public/Granted day:2022-09-15
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