- 专利标题: Pick-and-place system with a stabilizer
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申请号: US17700497申请日: 2022-03-22
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公开(公告)号: US12027403B2公开(公告)日: 2024-07-02
- 发明人: Jen-Yuan Chang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 主分类号: H01L21/68
- IPC分类号: H01L21/68 ; B65G47/90 ; B65G47/91 ; H01L21/67 ; H01L21/683
摘要:
A pick-and-place system is provided. The pick-and-place system includes: a wafer holder configured to hold a bottom die; a gantry having a stabilizer extending downwardly; a primary drive mechanism connected to the gantry and configured to drive the gantry horizontally and vertically; a suction head configured to hold a top die; and a secondary drive mechanism located at the gantry and connected to the suction head and configured to drive the suction head horizontally and vertically to place the top die on the bottom die at a target position. The primary drive mechanism drives the gantry vertically until the stabilizer is in contact with the bottom die before the secondary drive mechanism drives the suction head.
公开/授权文献
- US20230307281A1 PICK-AND-PLACE SYSTEM WITH A STABILIZER 公开/授权日:2023-09-28
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