- 专利标题: Method for manufacturing holding device and holding device
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申请号: US17052634申请日: 2019-01-08
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公开(公告)号: US12027406B2公开(公告)日: 2024-07-02
- 发明人: Makoto Kuribayashi , Masahiro Inoue , Toshimasa Sakakibara
- 申请人: NGK SPARK PLUG CO., LTD.
- 申请人地址: JP Nagoya
- 专利权人: NITERRA CO., LTD.
- 当前专利权人: NITERRA CO., LTD.
- 当前专利权人地址: JP Nagoya
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP 18101625 2018.05.28
- 国际申请: PCT/JP2019/000154 2019.01.08
- 国际公布: WO2019/230031A 2019.12.05
- 进入国家日期: 2020-11-03
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; C04B37/02 ; H01L21/687
摘要:
A holding device manufacturing method includes a step of preparing a first joined body which includes a pre-machining ceramic member having a first surface and a fifth surface located opposite the first surface and approximately parallel to the first surface, a base member, and a joining portion disposed between the first surface of the pre-machining ceramic member and a third surface of the base member and joining the pre-machining ceramic member and the base member together. The thickness of the joining portion of the first joined body in a first direction, in which the first surface and the third surface face each other via the joining portion, increases from one end side toward the other end side of the joining portion in a second direction perpendicular to the first direction. The method includes a step of machining the fifth surface of the pre-machining ceramic member in the first joined body.
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