Invention Grant
- Patent Title: Semiconductor chip having a through electrode and semiconductor package including the semiconductor chip
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Application No.: US17568355Application Date: 2022-01-04
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Publication No.: US12027482B2Publication Date: 2024-07-02
- Inventor: Jeonggi Jin , Gyuho Kang , Unbyoung Kang , Heewon Kim , Jumyong Park , Hyunsu Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20210089938 2021.07.08
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/48 ; H01L23/522 ; H01L23/532

Abstract:
A semiconductor chip includes: a semiconductor substrate; a pad insulating layer on the semiconductor substrate; a through electrode which penetrates the semiconductor substrate and the pad insulating layer and includes a conductive plug and a conductive barrier layer surrounding a sidewall of the conductive plug; and a bonding pad which surrounds a sidewall of the through electrode and is spaced apart from the conductive plug with the conductive barrier layer disposed therebetween.
Public/Granted literature
- US20230010936A1 SEMICONDUCTOR CHIP AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME Public/Granted day:2023-01-12
Information query
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