Invention Grant
- Patent Title: Leak detection for gas sticks
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Application No.: US18190418Application Date: 2023-03-27
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Publication No.: US12031885B2Publication Date: 2024-07-09
- Inventor: Yen-Kun Wang , Alex J. Tom , Ming Xu , Ashley Okada , Kenneth Le
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G01M3/28
- IPC: G01M3/28 ; H01L21/67
Abstract:
A method and system for monitoring and detecting a gas leak in a gas stick assembly is provided. The method includes measuring a pressure in a mass flow controller of the gas stick assembly at different time points and determining whether there is a difference in pressure at the different time points that exceeds a difference threshold.
Public/Granted literature
- US20230314269A1 LEAK DETECTION FOR GAS STICKS Public/Granted day:2023-10-05
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