Invention Grant
- Patent Title: MEMS inertial sensor with high resilience to the phenomenon of stiction
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Application No.: US18056203Application Date: 2022-11-16
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Publication No.: US12038454B2Publication Date: 2024-07-16
- Inventor: Francesco Rizzini , Gabriele Gattere , Sarah Zerbini
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: SEED IP LAW GROUP LLP
- Priority: IT 2020000005563 2020.03.16
- Main IPC: G01P15/03
- IPC: G01P15/03 ; B81B3/00 ; G01C19/5733 ; G01P15/08 ; G01P15/125 ; G01P15/18

Abstract:
A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.
Public/Granted literature
- US20230083632A1 MEMS INERTIAL SENSOR WITH HIGH RESILIENCE TO THE PHENOMENON OF STICTION Public/Granted day:2023-03-16
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