Invention Grant
- Patent Title: Heat pipe for vertically stacked field effect transistors
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Application No.: US17841202Application Date: 2022-06-15
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Publication No.: US12040250B2Publication Date: 2024-07-16
- Inventor: Terence Hook , Brent A. Anderson , Anthony I. Chou
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Samuel Waldbaum
- Main IPC: H01L23/427
- IPC: H01L23/427 ; H01L23/522 ; H01L27/12

Abstract:
A heat pipe is provided as an electrically inactive structure to dissipate heat that is generated by vertically stacked field effect transistors (FETs). The heat pipe is present in an electrically inactive device area which is located adjacent to an electrically active device area that includes the vertically stacked FETs. The heat pipe includes at least one vertical interconnect structure that continuously extends between each tier of the vertically stacked FETs.
Public/Granted literature
- US20230411241A1 HEAT PIPE FOR VERTICALLY STACKED FIELD EFFECT TRANSISTORS Public/Granted day:2023-12-21
Information query
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