Invention Grant
- Patent Title: Microelectronic devices including differently sized conductive contact structures, and related memory devices, electronic systems, and methods
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Application No.: US17314485Application Date: 2021-05-07
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Publication No.: US12040274B2Publication Date: 2024-07-16
- Inventor: Lingyu Kong , Lifang Xu , Indra V. Chary , Shuangqiang Luo , Sok Han Wong
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H01L21/768 ; H01L23/00 ; H01L23/528 ; H01L23/535 ; H10B43/27

Abstract:
A microelectronic device comprises a stack structure comprising insulative structures vertically interleaved with conductive structures, first support pillar structures vertically extending through the stack structure in a first staircase region including steps defined at edges of tiers of the insulative structures and conductive structures, and second support pillar structures vertically extending through the stack structure in a second staircase region including additional steps defined at edges of additional tiers of the insulative structures and conductive structures, the second support pillar structures having a smaller cross-sectional area than the first support pillar structures. Related memory devices, electronic systems, and methods are also described.
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