Invention Grant
- Patent Title: Method of electrical trimming of sensitivity and frequency response for piezoelectric MEMS
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Application No.: US18162212Application Date: 2023-01-31
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Publication No.: US12075212B2Publication Date: 2024-08-27
- Inventor: Christian Bretthauer , Andreas Bogner , Gabriele Bosetti , Niccoló De Milleri
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP 157127 2022.02.16
- Main IPC: H04R17/10
- IPC: H04R17/10 ; B81B7/00 ; H04R3/00 ; H04R7/06 ; H04R17/02
Abstract:
A Micro-Electro-Mechanical System (MEMS) device comprises a piezoelectric transducer having a first frequency behavior, wherein the piezoelectric transducer comprises a piezoelectric trimming region, and control circuitry to provide a bias signal to the piezoelectric trimming region of the piezoelectric transducer for adjusting a second frequency behavior of the piezoelectric transducer.
Public/Granted literature
- US20230262397A1 METHOD OF ELECTRICAL TRIMMING OF SENSITIVITY AND FREQUENCY RESPONSE FOR PIEZOELECTRIC MEMS Public/Granted day:2023-08-17
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