- 专利标题: Plasma generation systems with multi-dimensional impedance matching networks
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申请号: US18080547申请日: 2022-12-13
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公开(公告)号: US12080520B2公开(公告)日: 2024-09-03
- 发明人: Anthony Oliveti , Dean Maw , Keith Rouse , Gary Russell , Tigran Poghosyan
- 申请人: COMET TECHNOLOGIES USA, INC.
- 申请人地址: US CA San Jose
- 专利权人: COMET TECHNOLOGIES USA, INC.
- 当前专利权人: COMET TECHNOLOGIES USA, INC.
- 当前专利权人地址: US CA San Jose
- 代理机构: Nolte Lackenbach Siegel
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma generation system includes an impedance matching network calibrated to map desired matching network impedance values to closest available settings of impedance control components. The tuning controller defines a set of target impedance values spaced-apart throughout the tuning range and drives the matching network to generate a set of closest frame tuning values proximate to each target impedance value. The tuning controller computes interpolated tuning values between adjacent pairs of frame tuning values and stores a tuning database that maps available matching network impedance values to specific sets of settings for the impedance control components. After the calibration stage, the tuning controller automatically utilizes the tuning database to map desired matching network impedance values to available settings of the impedance control components on an ongoing basis. Representative embodiments include variable loading and tuning capacitors in series with a fixed or variable phase-shift inductor.
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