发明授权
- 专利标题: Wet alignment method for micro-semiconductor chip and display transfer structure
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申请号: US18312641申请日: 2023-05-05
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公开(公告)号: US12080585B2公开(公告)日: 2024-09-03
- 发明人: Kyungwook Hwang , Junsik Hwang
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR 20200085248 2020.07.10 KR 20210011792 2021.01.27
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L25/075 ; H01L33/50 ; H01L33/52 ; H01L33/62
摘要:
A wet alignment method for a micro-semiconductor chip and a display transfer structure are provided. The wet alignment method for a micro-semiconductor chip includes: supplying a liquid to a transfer substrate including a plurality of grooves; supplying the micro-semiconductor chip onto the transfer substrate; scanning the transfer substrate by using an absorber capable of absorbing the liquid. According to the wet alignment method, the micro-semiconductor chip may be transferred onto a large area.
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