Invention Grant
- Patent Title: Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate
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Application No.: US17573134Application Date: 2022-01-11
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Publication No.: US12083646B2Publication Date: 2024-09-10
- Inventor: Hiroaki Shibue , Taro Takahashi , Toshiki Miyakawa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 21003921 2021.01.14
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/04

Abstract:
A polishing apparatus capable of acquiring accurate film thickness distribution information is disclosed. The polishing apparatus includes a polishing table, a plurality of film thickness sensors, and a controller. The controller analyzes film thickness distribution information of a substrate while identifying a notch position of the substrate based on the measured film thickness information, and outputs visualization information of the film thickness distribution with the notch position as a reference position.
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