Invention Grant
- Patent Title: Conveyance abnormality prediction system
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Application No.: US17765374Application Date: 2020-09-18
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Publication No.: US12084288B2Publication Date: 2024-09-10
- Inventor: Akira Nakamura
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 19181870 2019.10.02
- International Application: PCT/JP2020/035501 2020.09.18
- International Announcement: WO2021/065576A 2021.04.08
- Date entered country: 2022-03-30
- Main IPC: H05K13/02
- IPC: H05K13/02 ; B65G43/02

Abstract:
A conveyance abnormality prediction system includes an estimation unit that has a learned model having machine learned a relationship between a data set including sensor data outputted, at a time of substrate transport in the past, from each of a plurality of sensors provided on a substrate transport unit and a degree of conveyance abnormality at the time of the substrate transport, estimates a degree of conveyance abnormality at a time of new substrate transport by using, as an input, a data set including sensor data outputted from each of the plurality of sensors at the time of the new substrate transport, and outputs the estimated degree of conveyance abnormality.
Public/Granted literature
- US20220363487A1 CONVEYANCE ABNORMALITY PREDICTION SYSTEM Public/Granted day:2022-11-17
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