• Patent Title: Conveyance abnormality prediction system
  • Application No.: US17765374
    Application Date: 2020-09-18
  • Publication No.: US12084288B2
    Publication Date: 2024-09-10
  • Inventor: Akira Nakamura
  • Applicant: EBARA CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: EBARA CORPORATION
  • Current Assignee: EBARA CORPORATION
  • Current Assignee Address: JP Tokyo
  • Agency: BakerHostetler
  • Priority: JP 19181870 2019.10.02
  • International Application: PCT/JP2020/035501 2020.09.18
  • International Announcement: WO2021/065576A 2021.04.08
  • Date entered country: 2022-03-30
  • Main IPC: H05K13/02
  • IPC: H05K13/02 B65G43/02
Conveyance abnormality prediction system
Abstract:
A conveyance abnormality prediction system includes an estimation unit that has a learned model having machine learned a relationship between a data set including sensor data outputted, at a time of substrate transport in the past, from each of a plurality of sensors provided on a substrate transport unit and a degree of conveyance abnormality at the time of the substrate transport, estimates a degree of conveyance abnormality at a time of new substrate transport by using, as an input, a data set including sensor data outputted from each of the plurality of sensors at the time of the new substrate transport, and outputs the estimated degree of conveyance abnormality.
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