In an anti-fuse programming control circuit based on a master-slave charge pump structure, a master charge pump module obtains an external voltage and is connected to a plurality of slave charge pump modules. Each slave charge pump module is connected to an anti-fuse bank. The distance between the layout position of each slave charge pump module and the layout position of the connected anti-fuse bank does not exceed a predetermined distance. Based on a programming voltage output by each slave charge pump module to the connected anti-fuse bank, the feedback network outputs a feedback signal corresponding to the slave charge pump module to the master charge pump module. Based on the feedback signal corresponding to each slave charge pump module, the master charge pump module adjusts a master drive signal provided to the slave charge pump module to stabilize the programming voltage output by the slave charge pump module.