- Patent Title: Composition for forming underlayer film for imprinting, method for producing composition for forming underlayer film for imprinting, pattern producing method, method for manufacturing semiconductor element, cured product, and kit
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Application No.: US17211843Application Date: 2021-03-25
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Publication No.: US12091497B2Publication Date: 2024-09-17
- Inventor: Yuichiro Goto , Akihiro Hakamata
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP 18185117 2018.09.28
- Main IPC: C08G61/04
- IPC: C08G61/04 ; C08F222/10 ; C08K3/08 ; G03F7/00 ; H01L21/027

Abstract:
Provided are a composition for forming an underlayer film for imprinting, including a curable component, and a particulate metal which has a particle diameter of 10 nm or larger, as measured by a single particle ICP-MASS method, and contains at least one kind of iron, copper, titanium, or lead, in which a content of the particulate metal is 50 ppt by mass to 10 ppb by mass with respect to the composition; a method for producing a composition for forming an underlayer film for imprinting; a pattern producing method; a method for manufacturing a semiconductor element; a cured product; and a kit.
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