- 专利标题： Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water
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申请号： US17461262申请日： 2021-08-30
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公开(公告)号： US12103874B2公开(公告)日： 2024-10-01
- 发明人: Steve D. Sitkiewitz , Gary M. Carmignani , Lee W. Frederick
- 申请人： Evoqua Water Technologies LLC
- 申请人地址： US PA Pittsburgh
- 专利权人： Evoqua Water Technologies LLC
- 当前专利权人： Evoqua Water Technologies LLC
- 当前专利权人地址： US PA Pittsburgh
- 主分类号： C02F1/72
- IPC分类号： C02F1/72 ; C02F1/32 ; C02F1/20 ; C02F1/42 ; C02F1/44 ; C02F1/469 ; C02F1/66 ; C02F103/04 ; C02F103/34
摘要：
In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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