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公开(公告)号：US20210387878A1
公开(公告)日：2021-12-16
申请号：US17461262
申请日：2021-08-30
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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公开(公告)号：US12103874B2
公开(公告)日：2024-10-01
申请号：US17461262
申请日：2021-08-30
IPC分类号： C02F1/72 , C02F1/32 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/66 , C02F103/04 , C02F103/34
CPC分类号： C02F1/722 , C02F1/325 , C02F1/20 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4695 , C02F1/66 , C02F2103/04 , C02F2103/346 , C02F2209/001 , C02F2209/003 , C02F2209/20
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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3.发明申请公开(公告)号：US20200148563A1
公开(公告)日：2020-05-14
申请号：US16739071
申请日：2020-01-09
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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公开(公告)号：US10550020B2
公开(公告)日：2020-02-04
申请号：US16504942
申请日：2019-07-08
IPC分类号： C02F1/00 , C02F1/72 , C02F1/20 , C02F1/42 , C02F1/469 , C02F1/32 , C02F1/44 , C02F1/66 , C02F103/04 , C02F103/34
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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5.发明申请公开(公告)号：US20200002198A1
公开(公告)日：2020-01-02
申请号：US16504942
申请日：2019-07-08
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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公开(公告)号：US10343939B2
公开(公告)日：2019-07-09
申请号：US14169928
申请日：2014-01-31
IPC分类号： C02F1/00 , C02F1/72 , C02F1/20 , C02F1/42 , C02F1/469 , C02F1/32 , C02F1/44 , C02F1/66 , C02F103/04 , C02F103/34
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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7.发明申请ULTRAVIOLET LIGHT ACTIVATED OXIDATION PROCESS FOR THE REDUCTION OF ORGANIC CARBON IN SEMICONDUCTOR PROCESS WATER 审中-公开用于在半导体工艺水中还原有机碳的超紫外光活化氧化工艺公开(公告)号：US20140144821A1
公开(公告)日：2014-05-29
申请号：US14169928
申请日：2014-01-31
CPC分类号： C02F1/722 , C02F1/20 , C02F1/325 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4695 , C02F1/66 , C02F2103/04 , C02F2103/346 , C02F2209/001 , C02F2209/003 , C02F2209/20
摘要： In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
摘要翻译： 在用于分解用于半导体制造的水中的有机化合物的系统中，具有流体入口和流体出口的化学反应器容器，反应器容器上游的过硫酸盐阴离子加成系统以及容纳在反应器容器内的发光器件。 发光器件提供能够分解过硫酸根阴离子的光。
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