- 专利标题: Vibrator and method for manufacturing vibrator
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申请号: US17397650申请日: 2021-08-09
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公开(公告)号: US12107561B2公开(公告)日: 2024-10-01
- 发明人: Shigeo Ojima
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: ArentFox Schiff LLP
- 优先权: JP 19067622 2019.03.29
- 主分类号: H03H9/10
- IPC分类号: H03H9/10 ; H03H3/02 ; H03H9/19
摘要:
A method for manufacturing a vibrator that includes forming excitation electrodes, lead-out electrodes, and first sealing frames on the main surfaces of a crystal piece; forming second sealing frames on the main surfaces of a base part and a lid part; and sealing a crystal vibration element by bonding the first sealing frames to the second sealing frames. The first sealing frames each include a first Ti or Cr base layer 110, and a first Au surface layer. The first Ti or Cr base layers are thinner than the first Au surface layers. The second sealing frames each include a second Ni base layer, and a second AuSn surface layer. The second Ni base layers are thicker than the second AuSn surface layers. The sealing is carried out by alloying the first Au surface layers and the second AuSn surface layers to each other.
公开/授权文献
- US20210367579A1 VIBRATOR AND METHOD FOR MANUFACTURING VIBRATOR 公开/授权日:2021-11-25
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