Invention Grant
- Patent Title: Vibrator and method for manufacturing vibrator
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Application No.: US17397650Application Date: 2021-08-09
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Publication No.: US12107561B2Publication Date: 2024-10-01
- Inventor: Shigeo Ojima
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Priority: JP 19067622 2019.03.29
- Main IPC: H03H9/10
- IPC: H03H9/10 ; H03H3/02 ; H03H9/19

Abstract:
A method for manufacturing a vibrator that includes forming excitation electrodes, lead-out electrodes, and first sealing frames on the main surfaces of a crystal piece; forming second sealing frames on the main surfaces of a base part and a lid part; and sealing a crystal vibration element by bonding the first sealing frames to the second sealing frames. The first sealing frames each include a first Ti or Cr base layer 110, and a first Au surface layer. The first Ti or Cr base layers are thinner than the first Au surface layers. The second sealing frames each include a second Ni base layer, and a second AuSn surface layer. The second Ni base layers are thicker than the second AuSn surface layers. The sealing is carried out by alloying the first Au surface layers and the second AuSn surface layers to each other.
Public/Granted literature
- US20210367579A1 VIBRATOR AND METHOD FOR MANUFACTURING VIBRATOR Public/Granted day:2021-11-25
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