- 专利标题: Three terminal phase change memory with self-aligned contacts
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申请号: US17473359申请日: 2021-09-13
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公开(公告)号: US12108692B2公开(公告)日: 2024-10-01
- 发明人: Heng Wu , Tian Shen , Kevin W. Brew , Jingyun Zhang
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Peter J. Edwards
- 主分类号: H10N70/20
- IPC分类号: H10N70/20 ; H10N70/00
摘要:
A phase change memory, a system, and a method to prevent high resistance drift within a phase change memory through a phase change memory cell with three terminals and self-aligned metal contacts. The phase change memory may include a bottom electrode. The phase change memory may also include a heater proximately connected to the bottom electrode. The phase change memory may also include a phase change material proximately connected to the heater. The phase change memory may also include metal proximately connected to at least two sides of the phase change material. The phase change memory may also include three terminals, where a bottom terminal is located at an area proximately connected to the heater and two top terminals are located at areas proximately connected to the metal.
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