• Patent Title: Reflective photomask blank and reflective photomask
  • Application No.: US17615083
    Application Date: 2020-05-28
  • Publication No.: US12111565B2
    Publication Date: 2024-10-08
  • Inventor: Ayumi GodaNorihito Fukugami
  • Applicant: TOPPAN INC.
  • Applicant Address: JP Tokyo
  • Assignee: TOPPAN INC.
  • Current Assignee: TOPPAN INC.
  • Current Assignee Address: JP Tokyo
  • Agency: Squire Patton Boggs (US) LLP
  • Priority: JP 19102991 2019.05.31
  • International Application: PCT/JP2020/021196 2020.05.28
  • International Announcement: WO2020/241780A 2020.12.03
  • Date entered country: 2021-11-29
  • Main IPC: G03F1/24
  • IPC: G03F1/24 G03F1/54
Reflective photomask blank and reflective photomask
Abstract:
There are provided a reflective photomask blank and a reflective photomask, which are compatibly capable of suppressing a shadowing effect and improving the life of a mask. A reflective photomask blank (10) includes a substrate (1), a reflection part (7) provided on the substrate (1) and configured to reflect incident light, and a low reflection part (8) provided on the reflection part (7) and configured to absorb incident light. The low reflection part (8) has a multi layer structure of at least two layers or more layers. An outermost layer (5) of the low reflection part (8) has a refractive index n equal to or more than 0.90 and an extinction coefficient k equal to or less than 0.02 with respect to extreme ultraviolet (EUV) light (where a wavelength is 13.5 nm).
Public/Granted literature
Information query
Patent Agency Ranking
0/0