Invention Grant
- Patent Title: Reflective photomask blank and reflective photomask
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Application No.: US17615083Application Date: 2020-05-28
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Publication No.: US12111565B2Publication Date: 2024-10-08
- Inventor: Ayumi Goda , Norihito Fukugami
- Applicant: TOPPAN INC.
- Applicant Address: JP Tokyo
- Assignee: TOPPAN INC.
- Current Assignee: TOPPAN INC.
- Current Assignee Address: JP Tokyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: JP 19102991 2019.05.31
- International Application: PCT/JP2020/021196 2020.05.28
- International Announcement: WO2020/241780A 2020.12.03
- Date entered country: 2021-11-29
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F1/54

Abstract:
There are provided a reflective photomask blank and a reflective photomask, which are compatibly capable of suppressing a shadowing effect and improving the life of a mask. A reflective photomask blank (10) includes a substrate (1), a reflection part (7) provided on the substrate (1) and configured to reflect incident light, and a low reflection part (8) provided on the reflection part (7) and configured to absorb incident light. The low reflection part (8) has a multi layer structure of at least two layers or more layers. An outermost layer (5) of the low reflection part (8) has a refractive index n equal to or more than 0.90 and an extinction coefficient k equal to or less than 0.02 with respect to extreme ultraviolet (EUV) light (where a wavelength is 13.5 nm).
Public/Granted literature
- US20220221784A1 REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK Public/Granted day:2022-07-14
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