- 专利标题: Line narrowing device, electronic device manufacturing method
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申请号: US17818916申请日: 2022-08-10
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公开(公告)号: US12111577B2公开(公告)日: 2024-10-08
- 发明人: Takahito Kumazaki , Osamu Wakabayashi
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; H01S3/08 ; H01S3/106
摘要:
A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.
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