- Patent Title: Three-dimensional memory devices and methods for forming the same
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Application No.: US17480949Application Date: 2021-09-21
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Publication No.: US12113037B2Publication Date: 2024-10-08
- Inventor: Liang Chen , Wei Liu , Yanhong Wang , Zhiliang Xia , Wenxi Zhou , Kun Zhang , Yuancheng Yang
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/00 ; H01L25/00 ; H01L25/18

Abstract:
In certain aspects, a three-dimensional (3D) memory device includes a first semiconductor structure, a second semiconductor structure, a third semiconductor structure, a first bonding interface between the first semiconductor structure and the second semiconductor structure, and a second bonding interface between the second semiconductor structure and the third semiconductor structure. The first semiconductor structure includes an array of NAND memory strings and a first semiconductor layer in contact with sources of the array of NAND memory strings. The second semiconductor structure includes a first peripheral circuit of the array of NAND memory strings including a first transistor, and a second semiconductor layer in contact with the first transistor. A third semiconductor structure includes a second peripheral circuit of the array of NAND memory strings including a second transistor, and a third semiconductor layer in contact with the second transistor. The second semiconductor layer is between the first bonding interface and the first peripheral circuit. The second peripheral circuit is between the second bonding interface and the third semiconductor layer.
Public/Granted literature
- US20230005859A1 THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2023-01-05
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