Invention Grant
- Patent Title: Oxidation-resistant metallic tin
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Application No.: US17287205Application Date: 2020-02-27
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Publication No.: US12129529B2Publication Date: 2024-10-29
- Inventor: Takahiro Uchida , Toru Imori , Koichi Takemoto , Shiro Tsukamoto
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Advanced Metals Corporation
- Current Assignee: JX Advanced Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 19039018 2019.03.04
- International Application: PCT/JP2020/008020 2020.02.27
- International Announcement: WO2020/179614A 2020.09.10
- Date entered country: 2021-04-21
- Main IPC: C22C13/00
- IPC: C22C13/00 ; B65D81/20

Abstract:
In the present invention, a high-purity metallic tin suitable for use in an EUV exposure device is provided through use of an oxidation-resistant metallic tin, the oxidation-resistant metallic tin containing 99.995 mass % or more of tin, and unavoidable impurities, and the thickness of an oxide film being 2.0 nm or less when the surface of a cut face of the oxidation-resistant metallic tin is measured by AES.
Public/Granted literature
- US20210381082A1 OXIDATION-RESISTANT METALLIC TIN Public/Granted day:2021-12-09
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