- 专利标题: Super-resolution thermoreflectance thermal measurement system
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申请号: US17964519申请日: 2022-10-12
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公开(公告)号: US12130228B2公开(公告)日: 2024-10-29
- 发明人: Brian M. Foley , Devon A. Eichfeld
- 申请人: The Penn State Research Foundation
- 申请人地址: US PA University Park
- 专利权人: The Penn State Research Foundation
- 当前专利权人: The Penn State Research Foundation
- 当前专利权人地址: US PA University Park
- 代理机构: Dinsmore & Shohl LLP
- 主分类号: G01N21/17
- IPC分类号: G01N21/17 ; G01N21/55
摘要:
A system and method for performing nanoscale thermal property characterization of materials. The system combines the operating principles of thermoreflectance-based techniques and scanning probe microscopy techniques into a hybrid solution capable of deriving thermophysical properties of a sample. A pump laser beam heats a distal end of a cantilever, and a probe laser beam is reflected off of a specular surface at the distal end of the cantilever carrying with it thermoreflectance data that can be used to extract thermophysical properties of the sample region adjacent to a tip suspended at the distal end of the cantilever.
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