Invention Grant
- Patent Title: Inspection system
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Application No.: US17799251Application Date: 2021-03-02
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Publication No.: US12131930B2Publication Date: 2024-10-29
- Inventor: Asaf Schlezinger , Markus J. Stopper
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2021/020410 2021.03.02
- International Announcement: WO2021/202029A 2021.10.07
- Date entered country: 2022-08-11
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B65G15/12 ; B65G47/64 ; B65G49/06 ; H01L21/677

Abstract:
Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and a second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.
Public/Granted literature
- US20230075394A1 INSPECTION SYSTEM Public/Granted day:2023-03-09
Information query
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