- 专利标题: Bottom select gate contacts for center staircase structures in three-dimensional memory devices
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申请号: US17117619申请日: 2020-12-10
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公开(公告)号: US12133385B2公开(公告)日: 2024-10-29
- 发明人: Jason Guo , Qiang Tang
- 申请人: Yangtze Memory Technologies Co., Ltd.
- 申请人地址: CN Hubei
- 专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人地址: CN Hubei
- 代理机构: Conley Rose, P.C.
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H10B41/10 ; H10B41/27 ; H10B43/10
摘要:
A three-dimensional (3D) memory device and a fabricating method for forming the same are disclosed. The 3D memory device can include an alternating conductor/dielectric layer stack disposed on a substrate, a first staircase structure and a second staircase structure formed in the alternating conductor/dielectric layer stack, a staircase bridge extending in a first direction and electrically connecting the first staircase structure and the second staircase structure, and a first bottom select gate segment covered or partially covered by the staircase bridge. The first bottom select gate segment can include an extended portion extending in a second direction different from the first direction.
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