Invention Grant
- Patent Title: Piezoelectric substrate, piezoelectric element and liquid ejection head
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Application No.: US18069270Application Date: 2022-12-21
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Publication No.: US12138926B2Publication Date: 2024-11-12
- Inventor: Yasuaki Hamada , Tomohiro Sakai , Toshihiro Shimizu , Masao Nakayama
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2021-209176 20211223
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H10N30/00 ; H10N30/20 ; H10N30/853

Abstract:
A piezoelectric substrate includes: a substrate; a first electrode formed on the substrate; and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium. A full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.
Public/Granted literature
- US20230202173A1 PIEZOELECTRIC SUBSTRATE, PIEZOELECTRIC ELEMENT AND LIQUID EJECTION HEAD Public/Granted day:2023-06-29
Information query
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