公开(公告)号：US12138926B2

公开(公告)日：2024-11-12

申请号：US18069270

申请日：2022-12-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Yasuaki Hamada ,  Tomohiro Sakai ,  Toshihiro Shimizu ,  Masao Nakayama

IPC: B41J2/14 ,  H10N30/00 ,  H10N30/20 ,  H10N30/853

Abstract: A piezoelectric substrate includes: a substrate; a first electrode formed on the substrate; and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium. A full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.

公开(公告)号：US11527699B2

公开(公告)日：2022-12-13

申请号：US17361410

申请日：2021-06-29

Applicant: Seiko Epson Corporation

Inventor： Yasuaki Hamada ,  Tomohiro Sakai

IPC: H01L41/00 ,  H01L41/04 ,  H01L41/09 ,  B41J2/14 ,  H01L41/187

Abstract: A piezoelectric element includes: a first electrode and a second electrode; and a piezoelectric layer provided between the first electrode and the second electrode and having a perovskite structure, in which 0

公开(公告)号：US10181555B2

公开(公告)日：2019-01-15

申请号：US15896439

申请日：2018-02-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Kazuya Kitada ,  Koji Sumi ,  Tomohiro Sakai ,  Toshiaki Takahashi

IPC: B41J2/14 ,  H01L41/187 ,  H01L41/09 ,  H01L41/08

Abstract: A piezoelectric element includes a first electrode, a second electrode, and a thin piezoelectric layer. The thin piezoelectric layer is provided between the first electrode and the first electrode, and is formed of a perovskite type compound oxide which contains potassium, sodium, and niobium. In the piezoelectric layer, in an X-ray diffraction pattern obtained by θ−2θ measurement, peaks derived from a (002) plane and a (200) plane are provided in a range in which 2θ is from 45° to 47°, a peak position of the peak on a high angle side among the peaks satisfies 46.0°≤2θ≤46.5°, and a difference of 2θ between the peak on the high angle side and the peak on a low angle side is greater than 0.60°.

公开(公告)号：US09446588B2

公开(公告)日：2016-09-20

申请号：US14199279

申请日：2014-03-06

Applicant: Seiko Epson Corporation

Inventor： Tomohiro Sakai

IPC: B41J1/14 ,  H01L41/047 ,  B41J2/14 ,  H01L41/08 ,  H01L41/09

CPC classification number: B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0815 ,  H01L41/0973

Abstract: A liquid ejecting head includes a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer between the first and the second electrodes. The piezoelectric layer includes a buffer layer disposed on the first electrode and containing Bi and an element selected from Al, Si, Cr, and Mn and a complex oxide layer disposed on the buffer layer and having a perovskite structure containing Bi, Fe, Ba, and Ti.

Abstract translation: 液体喷射头包括压电元件，该压电元件包括​​在第一和第二电极之间的第一电极，第二电极和压电层。 压电层包括设置在第一电极上并包含Bi和选自Al，Si，Cr和Mn的元素的缓冲层和设置在缓冲层上的复合氧化物层，并且具有包含Bi，Fe，Ba， 和Ti。

公开(公告)号：US11374162B2

公开(公告)日：2022-06-28

申请号：US16031017

申请日：2018-07-10

Applicant: Seiko Epson Corporation

Inventor： Koji Sumi ,  Tomokazu Kobayashi ,  Tomohiro Sakai ,  Kazuya Kitada ,  Koichi Morozumi ,  Tsutomu Asakawa

IPC: H01L41/09 ,  H01L41/29 ,  H01L41/047 ,  H01L41/187 ,  H01L41/317 ,  B41J2/14

Abstract: A piezoelectric element includes a first electrode; a piezoelectric layer, placed on or above the first electrode, containing potassium, sodium, niobium, titanium, and oxygen; and a second electrode placed on or above the piezoelectric layer.

公开(公告)号：US10355196B2

公开(公告)日：2019-07-16

申请号：US15378474

申请日：2016-12-14

Applicant: Seiko Epson Corporation

Inventor： Tomohiro Sakai ,  Kazuya Kitada ,  Koji Sumi

IPC: H01L41/27 ,  B41J2/14 ,  H01L41/047 ,  H01L41/083 ,  H01L41/187 ,  B41J2/16 ,  H01L41/08 ,  H01L41/318

Abstract: A piezoelectric element includes a first electrode, a piezoelectric layer formed of a first piezoelectric film which is formed on the first electrode and which includes potassium, sodium, and niobium and a plurality of second piezoelectric films which are formed on the first piezoelectric film and which include potassium, sodium, and niobium, and a second electrode formed on the piezoelectric layer, in which the piezoelectric layer is a stack of a plurality of piezoelectric films, the first piezoelectric film has a thickness of 30 nm to 70 nm, a concentration of sodium in each of the piezoelectric films is along a gradient in the film thickness direction with the first electrode side being high and the second electrode side being low.

公开(公告)号：US09276193B2

公开(公告)日：2016-03-01

申请号：US14226086

申请日：2014-03-26

Applicant: Seiko Epson Corporation

Inventor： Koji Sumi ,  Kazuya Kitada ,  Tomohiro Sakai ,  Yasuaki Hamada ,  Tetsuya Isshiki ,  Satoshi Kimura ,  Akio Ito ,  Tsuneo Handa

IPC: B41J2/045 ,  H01L41/18 ,  B41J2/14 ,  C04B35/468 ,  C04B35/475 ,  H01L41/187 ,  B06B1/06 ,  H02N2/00 ,  H02N2/18 ,  C04B35/462 ,  B41J2/16

CPC classification number: H01L41/183 ,  B06B1/06 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  C04B35/462 ,  C04B35/4682 ,  C04B35/475 ,  C04B2235/3201 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3234 ,  C04B2235/3236 ,  C04B2235/3255 ,  C04B2235/3298 ,  C04B2235/441 ,  C04B2235/76 ,  C04B2235/765 ,  C04B2235/768 ,  H01L41/187 ,  H01L41/1871 ,  H01L41/1873 ,  H01L41/1878 ,  H02N2/001 ,  H02N2/181

Abstract: A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1, a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature Tc2, and a third component that is configured to have a complex oxide with the perovskite structure in which the component is formed as the same crystal system as the second component and Curie temperature Tc3, in which Tc1 is higher than Tc2, and Tc3 is equal to or higher than Tc1.

Abstract translation: 压电材料包含第一组分，其是菱形结晶，其被配置为具有钙钛矿结构的复合氧化物和居里温度Tc1，第二组分是除了菱形晶体之外的晶体，其被配置为具有复合氧化物 钙钛矿结构和居里温度Tc2，以及第三成分，其被配置为具有其中形成组分的钙钛矿结构的复合氧化物与第二组分相同的晶体系和居里温度Tc3，其中Tc1高于 Tc2和Tc3等于或高于Tc1。

公开(公告)号：US20140292948A1

公开(公告)日：2014-10-02

申请号：US14199279

申请日：2014-03-06

Applicant: Seiko Epson Corporation

Inventor： Tomohiro Sakai

IPC: B41J2/14 ,  H01L41/08 ,  H01L41/047

CPC classification number: B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0815 ,  H01L41/0973

Abstract: A liquid ejecting head includes a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer between the first and the second electrodes. The piezoelectric layer includes a buffer layer disposed on the first electrode and containing Bi and an element selected from Al, Si, Cr, and Mn and a complex oxide layer disposed on the buffer layer and having a perovskite structure containing Bi, Fe, Ba, and Ti.

Abstract translation: 液体喷射头包括压电元件，该压电元件包括​​在第一和第二电极之间的第一电极，第二电极和压电层。 压电层包括设置在第一电极上并包含Bi和选自Al，Si，Cr和Mn的元素的缓冲层和设置在缓冲层上的复合氧化物层，并且具有包含Bi，Fe，Ba， 和Ti。

公开(公告)号：US11417828B2

公开(公告)日：2022-08-16

申请号：US16420685

申请日：2019-05-23

Applicant: Seiko Epson Corporation

Inventor： Tomohiro Sakai ,  Kazuya Kitada ,  Koji Sumi

IPC: H01L41/083 ,  H01L41/27 ,  B41J2/14 ,  B41J2/16 ,  H01L41/08 ,  H01L41/318 ,  H01L41/047 ,  H01L41/187

Abstract: A piezoelectric element includes a piezoelectric layer formed as a stacked structure of first, second, and third piezoelectric films. The first piezoelectric film is formed on a first electrode. The second piezoelectric film is formed on the first piezoelectric film. The third piezoelectric film is formed on the second piezoelectric film. Each of the first, second, and third piezoelectric films includes potassium, sodium, and niobium. A second electrode is formed on the piezoelectric layer. A concentration of sodium in the first piezoelectric film is greater than a concentration of sodium in the second piezoelectric film. The concentration of sodium in the second piezoelectric film is greater than a concentration of sodium in the third piezoelectric film.

公开(公告)号：US10937942B2

公开(公告)日：2021-03-02

申请号：US15916793

申请日：2018-03-09

Applicant: Seiko Epson Corporation

Inventor： Kazuya Kitada ,  Koji Sumi ,  Tomohiro Sakai ,  Toshiaki Takahashi ,  Tsutomu Asakawa

IPC: H01L41/04 ,  H01L41/187 ,  H01L41/08 ,  B41J2/14 ,  B41J2/16 ,  H01L41/113 ,  H01L41/318 ,  H01L41/047 ,  H01L41/27 ,  H01L41/09

Abstract: A piezoelectric element includes a substrate, a first electrode formed on the substrate, a piezoelectric layer, which is a layered structure of a plurality of piezoelectric films each containing potassium, sodium, and niobium, formed on the first electrode, and a second electrode formed on the piezoelectric layer. A sodium concentration in the piezoelectric layer has a Na local maximum value, which is a local maximum value of the sodium concentration, in a first piezoelectric film, which is among the plurality of piezoelectric films, in the vicinity of the first electrode, a sodium concentration gradient decreasing from the Na local maximum value toward the second electrode, and a Na local minimum value, which is a local minimum value of the sodium concentration, near a boundary between the first piezoelectric film and a second piezoelectric film formed immediately above the first piezoelectric film.