Invention Grant
- Patent Title: Use of adaptive replacement maps in digital lithography for local cell replacement
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Application No.: US18470717Application Date: 2023-09-20
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Publication No.: US12141517B2Publication Date: 2024-11-12
- Inventor: Aravind Inumpudi , Thomas L. Laidig
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G06F30/30
- IPC: G06F30/30 ; G03F1/72 ; G03F7/00 ; G06F30/398 ; G06F119/18

Abstract:
Embodiments described herein relate to a system, software, and a method of using the system to edit a design to be printed by a lithography system. The system and methods utilize a server of a maskless lithography device. The server includes a memory. The memory includes a virtual mask file. The virtual mask file includes cells and the cells include sub-cells that form one or more polygons. The server further includes a controller coupled to the memory. The controller is configured to receive a replacement table. The replacement table includes instructions to replace the cells of the virtual mask file. The controller is further configured to replace the cells with replacement cells according to the replacement table to create an edited virtual mask file.
Public/Granted literature
- US20240012978A1 USE OF ADAPTIVE REPLACEMENT MAPS IN DIGITAL LITHOGRAPHY FOR LOCAL CELL REPLACEMENT Public/Granted day:2024-01-11
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