There is provided an analysis apparatus including: an acquisition unit configured to acquire a plurality of measured values obtained by measuring a device under measurement; a machine learning unit configured to use the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement; and an analysis unit configured to separate, from the plurality of measured values, the position-dependent component which is calculated by using the model learned by the machine learning unit. Further, there is provided an analysis method. Further, there is provided a recording medium having recorded thereon an analysis program.