Invention Grant
- Patent Title: CVD system with substrate carrier and associated mechanisms for moving substrate therethrough
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Application No.: US17305206Application Date: 2021-07-01
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Publication No.: US12163228B2Publication Date: 2024-12-10
- Inventor: Elad Mentovich , Yaniv Rotem , Yaakov Gridish , Doron Naveh , Chen Stern , Yosi Ben-Naim , Ariel Ismach , Eran Bar-Rabi , Tal Kaufman
- Applicant: MELLANOX TECHNOLOGIES, LTD. , BAR-ILAN UNIVERSITY , RAMOT AT TEL-AVIV UNIVERSITY LTD. , SIMTAL NANO-COATINGS LTD
- Applicant Address: IL Yokneam; IL Ramat Gan; IL Tel Aviv; IL Shimshit
- Assignee: MELLANOX TECHNOLOGIES, LTD.,BAR-ILAN UNIVERSITY,RAMOT AT TEL-AVIV UNIVERSITY LTD.,SIMTAL NANO-COATINGS LTD
- Current Assignee: MELLANOX TECHNOLOGIES, LTD.,BAR-ILAN UNIVERSITY,RAMOT AT TEL-AVIV UNIVERSITY LTD.,SIMTAL NANO-COATINGS LTD
- Current Assignee Address: IL Yokneam; IL Ramat Gan; IL Tel Aviv; IL Shimshit
- Agency: Moore & Van Allen PLLC
- Agent Michele M. Glessner
- Main IPC: C23C16/458
- IPC: C23C16/458

Abstract:
A substrate carrier and a mechanism for moving the substrate carrier through a chemical vapor deposition system are provided. The substrate carrier includes a cylindrical housing having an interior surface. A plurality of plurality of shelves fixed to the interior surface, each shelf configured to support at least one substrate. The substrate carrier may include a connector configured to engage the substrate carrier with the mechanism. The mechanism may include a moveable arm and a motor configured to actuate the moveable arm. The moveable arm may include an actuating member connected to the motor and configured to move the moveable arm between a retracted state and an extended state. The moveable arm may be configured to operate in a chamber having a first pressure and a first temperature and the motor may be configured to operate in an environment having a second pressure.
Public/Granted literature
- US20220372621A1 CVD SYSTEM WITH SUBSTRATE CARRIER AND ASSOCIATED MECHANISMS FOR MOVING SUBSTRATE THERETHROUGH Public/Granted day:2022-11-24
Information query
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